Primarily Developed for semiconductor applications, the AltiSurf®530 is also the basis for many metrology stations adapted to very specific customer needs.

Just like the AltiSurf®500 and 520, it can integrate all kind of sensor and fixturing.

Specificatios.

AXES:

• Length X, Y , Z (mm): 300 × 300 × 300.
• Motorized DC Axis.
• Flatness less than 2 .mu.m to 300mm after correction.
• Max Speed. : up to 40 mm/s.
• Option: Stepping 0,1 µm.
• Option: double rotary axis.